Quel liquide de refroidissement est utilisé dans une scie à fil pour trancher des wafers ? Eau désionisée, fluide de coupe, contrôle du pH

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Why do some wafers break while cutting? I have over 15 years experience in the wafer slicing wire saw industry, and I have seen how the improper coolant can damage a whole batch.

In this article we will explore what coolant to use, why DI water and cutting fluid matter, and how pH control makes your operation safe and clean.

What Is a Wafer Slicing Wire Saw and How Does It Work?

A wafer slicing wire saw is a kind of cutting machine. It cuts hard materials like silicon, SiC and sapphire into thin wafers. It employs a thin diamond-coated wire. The wire zips swiftly across the fabric. Groove wheels to keep the wire on the track. This means minimal kerf loss – very little material is lost. 

To slice the silicon wafer you need both speed and precision. Coolant is sprayed onto the cutting zone. It cools the wire and eliminates chopped pieces. Without cooling, wire and wafer might become too hot. This leads to cracks and damages.

Scie à fil pour trancher des wafers

Technical Overview: Wafer Slicing Wire Saw Key Parameters

ParamètreDétails
Type de filDiamond-coated steel wire
Vitesse du fil10–30 m/s
Type de liquide de refroidissementDI water / cutting fluid
Material CutSilicon, SiC, Sapphire
Kerf Loss100–200 µm
État de surfaceRa < 1 µm
Groove Wheel RoleWire tension and path control

Why Does Coolant Choice Matter in a High Speed Multi Wire Saw Machine?

Using the improper coolant poses major complications. It may snap a wire. It may harm the wafer surface. It might reduce your yield. In a machine de sciage multi-fils à haute vitesse coolant does more than just cool. It cleans away debris. It reduces drag. If the coolant is excessively acid or alkaline, it will eat the wire. 

It might also fracture the wafer from behind. That’s why we need to adjust the kind of coolant and pH. This is a must for all precision wire saw cutting systems. It is the secret to high precision wafer slicing and longer machine life.

What Is DI Water and Why Is It Used?

DI water stands for de-ionized water. It contains very few minerals. It is the primary coolant for most wafer slicing wire saw systems. It does not deposit on the wire, nor on the wafer.

  • DI water has an extremely low conductivity. Protects the wafer surface.
  • It cleans the cutting area. No Pollution.
  • And it can easily be filtered and reused in a closed-loop system.
  • It is compatible with cutting fluid additives.

DI Water Properties in Wire Saw Cooling

PropriétéValue / Description
Conductivity< 1 µS/cm
pH Range6.5 – 7.5 (neutral)
Particle Filtration0.2 – 1 µm filter size
Recycling RateUp to 90% in closed systems

How Does Cutting Fluid Help in the Silicon Wafer Slicing Wire Saw Process?

Cutting fluid mixed with DI water. It enhances lubrication and cooling. It reduces the heat at the wire-wafer contact point. It also helps to remove small chopped particles.

  • It reduces the surface tension. The coolant is distributed more evenly.
  • Protects the wire coating on extended cuts.
  • It decreases the danger of small subsurface damage cutting.
  • It is useful to maintain the groove wheel wire control steady.

How Does pH Control Protect Your SiC Wafer Cutting Equipment?

pH regulation is commonly forgotten. But that is really crucial.  “If the pH gets too high or too low, bad things will happen.” It may etch on the wafer surface. It may eat through the wire covering. pH changes induce pitting in SiC wafer cutting equipment, sapphire wafer slicing machine configurations. They also result in loss of flatness.

Sometimes the wiring breaks down. Maintaining pH between 8 and 9.5 is the norm. This guideline applies to most of the modern wafer slicing technology systems. Stable pH signifies stable findings run after run.

Que se passe-t-il lorsque le pH sort de la plage ?

Tableau comparatif : Effets du pH sur la plaquette et le fil

Niveau de pHEffet sur la plaquetteEffet sur le filNiveau de risque
En dessous de 6Gravure de surfaceCorrosion du filHaut
6 – 7,5Neutre, sûrFaible usureFaible
8 – 9,5Zone optimaleUsure minimaleTrès bas
Au-dessus de 10Dommages alcalinsCoating breakdownHaut

Keep pH between 6 and 9.5. The optimum zone for most thin wafer fabrication solution settings is approximately pH 8.5. It is slightly alkaline and quite harmless.

Advantages and Disadvantages of pH-Controlled Coolant Systems

Avantages :

  • Wires last longer. Replacement cost lowers.
  • Wafer surface improvement Less of the cracking.
  • Lower risk wire cutting procedures with less kerf loss.
  • The same quality of output, batch after batch.

Désavantages:

  • You require pH monitoring instruments. It costs money.
  • Your setup cost is increased by chemical dosing systems.
  • Operators need to be trained to handle it appropriately.

Which Industries Use pH-Controlled Coolant in Wire Saws?

  • Production of solar cells (mono- and polycrystalline silicon)
  • Power Electronics (SiC and GaN wafer manufacturing)
  • LED and optical components (sapphire wafer slicing)
  • Semiconductor fabs using ultra thin wafer cutting technologies

What Are Real-World Examples of Coolant Use in Wire Saw Cutting?

L'utilisation du liquide de refroidissement sur une scie à fil pour trancheuses de plaquettes varie pour chaque matériau. Chaque entreprise a ses propres exigences en matière de débit, de mélange et de pH. Les obtenir correctement augmentera la production et réduira les déchets. 

Haute précision wafer slicing wire saw Les entreprises emploient couramment des systèmes de refroidissement automatique. Cela réduit les erreurs humaines. Vous trouverez ci-dessous quelques exemples concrets de divers secteurs.

Études de cas : Utilisation du liquide de refroidissement par secteur industriel

IndustrieMatériauType de liquide de refroidissementpH RangeBénéfice clé
Solaire PVSi monocristallinEau désionisée + fluide PEG8,0 – 9,0Perte de matière réduite
Électronique de puissanceSiCFil diamanté + eau désionisée8,5 – 9,5Moins de dommages sous-jacents
Fabrication de LEDSaphirEau désionisée + tensioactif7,5 – 8,5Finition de surface propre
Usine de semi-conducteursSiliconSystème d'eau désionisée en boucle fermée6.5 – 8.0High purity output

How Vimfun Supports Advanced Coolant-Ready Wire Saw Systems

Searching for a quality wire saw cutting system you can rely on? Vimfun is a good pick. Their devices operate with SiC wafer cutting equipment, sapphire wafer slicing machine configurations and more. 

Vimfun systems have included a groove wheel wire control system. They provide coolant flow control as well. Check out Vimfun’s entire line of innovative wafer slice technology machines.

What Are the Best Practices for Coolant Management in Wire Saw Systems?

Excellent coolant care keeps your wafer slicing wire saw working smoothly. It also cuts down on waste. It protects the machine and the wafer. The following are the main practices employed in current high speed multi wire saw machine operations.

Key Best Practices

  • Test pH daily using a sensor or test kit
  • 0.2-1 µm filter for particle removal of coolant
  • – Use closed-loop system to reduce waste, recycle DI water
  • Check coolant mix weekly.. Too dilute less protection
  • Change the cutting fluid according your machine maker’s schedule
  • Flush system for changing material, such as silicon to SiC.
  • Log coolant data to detect issues early

Coolant Flow Rate Guidelines

Type de machineFlow RateCoolant Mix Ratio
Single wire saw5 – 10 L/min3–5% fluid in DI water
Multi wire saw (small)15 – 30 L/min3–5% fluid in DI water
High speed multi wire saw40 – 80 L/min5–8% fluid in DI water
SiC / Sapphire wire saw20 – 50 L/min5–10% fluid in DI water

FAQ

What is the best coolant for a wafer slicing wire saw?

The finest coolant is DI water with a cutting fluid added in. Surface cleaned with DI water. It leaves no mineral build-up. The cutting fluid acts as a lubricant and to manage heat. They function well together for the silicon wafer slicing process and ultra thin wafer cutting technology.

  • La qualité de l'eau désionisée doit être inférieure à 1 microS/cm
  • La quantité de liquide de coupe doit être de 3 à 8 % du volume total de
  • Assurez-vous que le fluide est compatible avec votre type de fil

Pourquoi le contrôle du pH est-il important dans la coupe de plaquettes de SiC ?

La régulation du pH maintient la surface de la plaquette et le revêtement du fil dans un état sûr. Le SiC est assez dur. Sa coupe crée de la chaleur et des contraintes chimiques. Un mauvais pH crée des micro-fissures. Il attaque également la surface. Cela réduit la qualité de la plaquette.

  • Un pH de 8,5 à 9,5 est le meilleur pH pour la coupe de SiC
  • Capteur de pH en ligne pour une surveillance en temps réel
  • Ajustez le pH pour l'augmenter avec du NaOH dilué, ou le diminuer avec de l'acide citrique

Puis-je réutiliser le liquide de refroidissement dans une machine de sciage à fil ?

Oui. Le recyclage du liquide de refroidissement est pris en charge par la plupart des équipements actuels de systèmes de coupe de sciage de précision à fil. Le liquide de refroidissement usagé est filtré et son pH est corrigé. Et ensuite à nouveau dans le réservoir. Cela peut réduire l'utilisation d'eau désionisée jusqu'à 90 %. Cela réduit également les dépenses de fonctionnement.

  • Les filtres multi-étapes fournissent des résultats optimaux
  • Surveillez la conductivité pour savoir quand changer l'eau désionisée
  • Changez le liquide de coupe à intervalles réguliers, pas seulement quand il a l'air horrible

Comment le liquide de refroidissement affecte-t-il la perte de matière (kerf loss) dans la coupe à fil ?

Un bon liquide de refroidissement réduit la friction et la chaleur. Le fil fait une coupe plus nette. Moins de chaleur = moins d'écaillage sur le bord de la coupe. Cela permet une coupe à fil avec une faible perte de matière et des plaquettes plus fines et plus uniformes.

  • Un bon liquide de refroidissement réduit la perte de matière (kerf loss) de 5 à 15 %
  • Constant flow rate ensures a consistent cut zone
  • Dirty coolant increases kerf loss greater and damages the wire quicker 

What coolant is used for sapphire wafer slicing?

Sapphire Wafer Slicing Machine Uses Low Foam Surfactant in DI Water. Sapphire is exceedingly hard – 9 on the Mohs scale. The abrasive particles must be immediately washed away by the coolant. For optimal results keep pH between 7.5 – 8.5.

  • Do not use high foam fluids. They stop the clearance of debris.
  • Sapphire particle elimination using 0.2um filters
  • Increased flow rates assist to cleanse the cut zone quicker

Conclusion

Proper coolant is the most important factor in an effective wafer slicing wire saw operation. DI water, cutting fluid, and pH control work together to safeguard your wire, your wafer and your yield. Bad coolant costs you money.  A good coolant will preserve it. 

If you want a machine designed for advanced wafer slicing technology and with complete coolant support, Vimfun is your best option. Their machines meet the slicing requirements of silicon, SiC and sapphire. Come to Vimfun now and find out which wire saw is appropriate for your production.

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