KX360MCZ
12-inch MCZ Crystal Puller for 300mm IC-Grade Silicon
The KX360MCZ is a 12-дюймовая установка для выращивания кристаллов MCZ engineered to grow 300mm COP-free monocrystalline silicon ingots for IC-grade wafer manufacturing. A horizontal superconducting magnetic field suppresses melt convection during growth, while the 316L mirror-polished chamber and ±0.05mm vision-based diameter control deliver the defect profile required for advanced logic and memory wafer fabs.
Built for COP-Free Wafers.
Optimized for Advanced Nodes.
Standard Czochralski pullers run into hard limits at 300mm. Natural melt convection at this diameter introduces oxygen striations and microdefects that disqualify the crystal for advanced logic and DRAM. The KX360MCZ adds a horizontal superconducting magnetic field — the same approach used at the world's leading 12-inch IC fabs — to actively suppress convection in the molten silicon. The result: COP-free crystal sections long enough for production-scale wafer slicing, with the oxygen control needed to hit modern wafer specs. The KX360MCZ as a 12-дюймовая установка для выращивания кристаллов MCZ is engineered specifically for this challenge.
Engineered for the things that break yield in production.
FEA-Validated Frame Structure
The full-system frame is FEA-modeled for resonance modes during meltdown and growth. Vibration leakage into the seed shaft is the silent killer of crystal yield — the structural mass and damping geometry here is engineered to keep low-frequency vibration out of the melt.
316L Mirror-Polished Growth Chamber
316L stainless inner walls, 360° mirror polished. The polish isn't cosmetic — particle adhesion drops sharply on a Ra <0.4μm surface, which makes between-batch chamber cleanup faster and reduces particulate inclusions in the next pull.
±0.05 mm Diameter Control
Vision algorithm plus control loop hold the crystal body diameter within ±0.05mm of recipe target. Loose diameter control means more grind-down loss when the ingot hits the cropper. ±0.05mm preserves usable diameter for downstream slicing.
One-Click Growth Recipes
Dip, neck, shoulder, body, and tail run as a single recipe. Operator intervention is reserved for exception handling — alarm response, recovery, recipe modification — not routine phase transitions. Reduces operator-induced variation across shifts.
Magnet-Platform Agnostic
Software and hardware interfaces are pre-configured to accept domestic Chinese, Japanese, and European superconducting magnet platforms. If you have an existing magnet service relationship, the puller integrates rather than forcing a vendor change.
Wide-Range Pressure Control
High-resolution butterfly valve plus mass flow controller plus active self-cleaning exhaust filter. The active filter matters: a passive filter clogs with SiO smoke during a long pull and chamber pressure drifts. Self-cleaning keeps argon flow stable for 100+ hour pulls.
Adjustable Heater Lift [OPT]
Optional heater lift mechanism gives the recipe an additional axis to tune. Useful when optimizing oxygen profile or thermal gradient at the solid-liquid interface — particularly for non-standard hot zones or new crystal recipes.
"The features that actually move yield are the ones nobody puts on a spec sheet — vibration damping, chamber finish, filter self-cleaning."
Технические характеристики
| # | Параметр | Технические характеристики |
|---|---|---|
| 01 | Max Crystal Diameter | 12 inch (300 mm) |
| 02 | Приложение | 12-inch MCZ crystal puller for IC-grade 300mm COP-free silicon |
| 03 | Chamber Inner Diameter | Φ1400 mm |
| 04 | Pull Chamber Height | 3500 – 5000 mm (custom) |
| 05 | Pull Chamber Diameter | Φ400 mm |
| 06 | Hot Zone Size Range | 32″ – 36″ |
| 07 | Magnetic Field Type | Horizontal superconducting (standard); other types on request |
| 08 | Diameter Control Accuracy | ±0.05 mm |
| 09 | Chamber Material | 316L stainless steel, 360° mirror polished |
| 10 | Heater Peak Power | Contact us for detailed specifications |
| 11 | Heater Continuous Power | Contact us for detailed specifications |
| 12 | Max Silicon Charge Weight | Contact us for detailed specifications |
| 13 | Crucible Diameter | Contact us for detailed specifications |
| 14 | Pull Rate Range | Contact us for detailed specifications |
| 15 | Vacuum Level (base pressure) | Contact us for detailed specifications |
| 16 | Argon Flow Range | Contact us for detailed specifications |
| 17 | Magnetic Field Strength | Contact us for detailed specifications |
| 18 | Heater Power Supply | Contact us for detailed specifications |
| 19 | Cooling Water Requirements | Contact us for detailed specifications |
| 20 | Overall Footprint (L × W × H) | Contact us for detailed specifications |
| 21 | Total Weight | Contact us for detailed specifications |
| 22 | Соответствие | Contact us for detailed specifications |
Who the KX360MCZ is built for.
A 12-inch MCZ crystal puller is a multi-million-dollar capital decision. It's not the right tool for every silicon producer. The four customer profiles below are where our 12-inch MCZ crystal puller delivers a clear ROI versus standard CZ alternatives.
12-inch IC Wafer Fabs
For new fabs commissioning 300mm capacity, or existing fabs adding MCZ capability to reach the lower oxygen and lower defect crystal grades required for advanced nodes.
Crystal Growth R&D Labs
Universities and corporate R&D groups developing novel crystal growth recipes who need a production-grade puller for process validation — not a benchtop research unit that won't scale.
IDM Wafer Suppliers Localizing Supply Chains
Wafer suppliers serving regions where US/Japan/Germany puller imports face restrictions or long lead times. The KX360MCZ provides an alternative with regional service support.
Capacity Expansion at 12-inch Producers
Existing 300mm wafer producers running aging pullers who want a modern unit with one-click automation and updated diameter control to lift yield per furnace.
Why MCZ for 300mm wafer-grade crystal?
Standard CZ pullers can grow 300mm crystals — but the defect profile rarely meets IC-grade specs without aggressive downstream screening. Adding a horizontal superconducting magnetic field (H-MCZ) changes the economics. The table below summarizes the trade-off at the wafer level.
| Метрика | Standard CZ Puller | KX360MCZ (H-MCZ) ★ |
|---|---|---|
| Crystal Diameter | up to 12″ (yield-limited) | 12″ optimized |
| Oxygen Control | Limited by natural convection | Active suppression via H-field |
| Defect Profile | Higher COP density | COP-free achievable |
| Best Application | Solar / industrial / non-IC Si | IC-grade logic & memory |
| Capital Cost | Ниже | Higher (magnet + cryogenics) |
| Operating Cost | Ниже | Higher (LHe / cryocooler) |
| Hot Zone Lifetime | Стандарт | Equivalent |
| Wafer Yield to IC Spec | Ниже | Significantly higher |
Why customers choose our 12-inch MCZ crystal puller.
We supply our 12-inch MCZ crystal puller as a complete program — equipment, hot zone customization, commissioning, and consumables — not a transactional sale. Here's what that looks like in practice.
Production-Validated Platform
The KX360MCZ is built on a hot-zone and control architecture proven at production-scale 300mm wafer fabs. This isn't a research-grade prototype — it's a commercial puller ready for cleanroom installation and continuous-shift operation.
Site Survey & Commissioning Included
12-inch puller installation requires precise foundation work, utility integration (LHe supply for the magnet, cryocooler power, fringe field clearance), and ramp-up. Our engineers conduct pre-delivery site survey and on-site commissioning end-to-end, and stay on site through first crystal qualification.
Hot Zone Co-Engineering
Hot zone configurations from 32″ to 36″ allow recipe tuning for specific oxygen, carbon, and resistivity targets. We co-engineer the hot zone with you based on your target wafer specification — not a one-size-fits-all configuration shipped from a catalog.
Long-Term Consumables Supply
Crucibles, graphite parts, and heater elements drive operating cost over the puller's 10+ year lifetime. We hold long-term supply agreements for KX-series consumables — relevant for production planning and OPEX forecasting.
Questions we get on 12-inch MCZ.
Other crystal pullers in our lineup.
The KX360MCZ is our flagship 12-inch model. We also supply pullers for smaller wafer diameters used in legacy logic, MEMS, sensors, and discrete power devices. If your project sits between standard wafer sizes, or you need a research-grade puller for crystal growth R&D, talk to us about custom configurations.
6-inch Crystal Puller
For 150mm semiconductor and specialty silicon applications. CZ and MCZ configurations both available.
CONTACT FOR DETAILS →8-inch Crystal Puller
For 200mm IC and power device wafer production. Most common workhorse size for power semiconductor and analog IC fabs.
CONTACT FOR DETAILS →KX360MCZ ★
For 300mm COP-free IC-grade wafer production. You're here.
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Related equipment in the
wafer production line.
The crystal puller is step one. After the ingot grows, it moves through cropping, slicing, lapping, and polishing. We supply the full downstream production line — meaning one supplier for the ingot-to-polished-wafer flow.
Sourcing a
12-inch MCZ crystal puller?
Whether you're buying your first 12-inch MCZ crystal puller or expanding existing capacity, share your wafer specification, target volume, and facility timeline. We'll respond within 24 hours with a technical fit assessment, lead time estimate, and a path to detailed specification sharing.